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Multifunctional Integrated Sensors for Multiparameter Monitoring Applications

Roozeboom, Clifton L., Hill, Bridget E., Hong, Vu Anh, Ahn, Chae Hyuck, Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W., Hopcroft, Matthew A., Pruitt, Beth L.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 3.16 MB

english, 2015

Temperature Dependence of the Elastic Constants of Doped Silicon

Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Ahn, Chae Hyuck, Everhart, Camille L. M., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 5.31 MB

english, 2015

Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C

Soon, Bo Woon, Qian, You, Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Ahn, Chae Hyuck, Kenny, Thomas W., Lee, Chengkuo

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 8.00 MB

english, 2015

[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Monolithic 591×438 DPI ultrasonic fingerprint sensor

Jiang, Xiaoyue, Tang, Hao-Yen, Lu, Yipeng, Li, Xi, Tsai, Julius M., Ng, Eldwin J., Daneman, Michael J., Lim, Martin, Assaderaghi, Fari, Boser, Bernhard E., Horsley, David A.

Рік:

2016

Файл:

PDF, 875 KB

2016

Ultrasonic Fingerprint Sensor With Transmit Beamforming Based on a PMUT Array Bonded to CMOS Circuitry

Jiang, Xiaoyue, Tang, Hao-yen, Lu, Yipeng, Ng, Eldwin, Tsai, Julius, Boser, Bernhard, Horsley, David

Журнал:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Рік:

2017

Мова:

english

Файл:

PDF, 1.07 MB

english, 2017

Monolithic ultrasound fingerprint sensor

Jiang, Xiaoyue, Lu, Yipeng, Tang, Hao-Yen, Tsai, Julius M., Ng, Eldwin J., Daneman, Michael J., Boser, Bernhard E., Horsley, David A.

Журнал:

Microsystems & Nanoengineering

Рік:

2017

Мова:

english

Файл:

PDF, 2.90 MB

english, 2017

Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application

Soon, Bo Woon, Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Ahn, Chae Hyuck, Qian, You, Kenny, Thomas W., Lee, Chengkuo

Журнал:

Journal of Microelectromechanical Systems

Рік:

2014

Мова:

english

Файл:

PDF, 5.00 MB

english, 2014

A Bistable Electrostatic Silicon Nanofin Relay for Nonvolatile Memory Application

Soon, Bowoon, Ng, Eldwin Jiaqiang, Singh, Navab, Tsai, Julius Minglin, Qian, You, Le, Chengkuo

Журнал:

Journal of Microelectromechanical Systems

Рік:

2013

Мова:

english

Файл:

PDF, 3.22 MB

english, 2013

Accurate Modeling of Quality Factor Behavior of Complex Silicon MEMS Resonators

Ghaffari, Shirin, Ng, Eldwin Jiaqiang, Ahn, Chae Hyuck, Yang, Yushi, Wang, Shasha, Hong, Vu A., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 2.39 MB

english, 2015

Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

Ahn, Chae Hyuck, Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Lee, Brian J., Flader, Ian, Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 4.08 MB

english, 2015

Fatigue Experiments on Single Crystal Silicon in an Oxygen-Free Environment

Hong, Vu A., Yoneoka, Shingo, Messana, Matthew W., Graham, Andrew B., Salvia, James C., Branchflower, Todd T., Ng, Eldwin J., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 4.29 MB

english, 2015

Erratum to “Temperature Dependence of the Elastic Constants of Doped Silicon” [Jun 15 730-741]

Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Ahn, Chae Hyuck, Everhart, Camille L. M., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 69 KB

english, 2015

[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Silicon-to-silicon microswitch with wide operation temperature range

Soon, Bo Woon, Qian, You, Ng, Eldwin J., Kenny, Thomas W., Lee, Chengkuo

Рік:

2015

Мова:

english

Файл:

PDF, 1.97 MB

english, 2015

3-D Ultrasonic Fingerprint Sensor-on-a-Chip

Tang, Hao-Yen, Lu, Yipeng, Jiang, Xiaoyue, Ng, Eldwin J., Tsai, Julius M., Horsley, David A., Boser, Bernhard E.

Журнал:

IEEE Journal of Solid-State Circuits

Рік:

2016

Мова:

english

Файл:

PDF, 4.47 MB

english, 2016

Nonlinearity of Degenerately Doped Bulk-Mode Silicon MEMS Resonators

Yang, Yushi, Ng, Eldwin J., Polunin, Pavel M., Chen, Yunhan, Flader, Ian B., Shaw, Steven W., Dykman, Mark I., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2016

Мова:

english

Файл:

PDF, 2.97 MB

english, 2016

Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator

Rodriguez, Janna, Chandorkar, Saurabh A., Watson, Christopher A., Glaze, Grant M., Ahn, C. H., Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.

Журнал:

Scientific Reports

Рік:

2019

Мова:

english

Файл:

PDF, 2.96 MB

english, 2019

[IEEE 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) - Singapore, Singapore (2018.12.4-2018.12.7)] 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) - A Lame Mode Resonator Based on Aluminum Nitride on Silicon Platform

Wang, Nan, Zhu, Yao, Wu, Guoqiang, Ding, Zhipeng, Ng, Eldwin Jiaqiang, Yoshio, Nishida, Chang, Peter Hyun Kee, Singh, Navab, Gu, Yuandong

Рік:

2018

Мова:

english

Файл:

PDF, 530 KB

english, 2018

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Resonant pressure sensor with on-chip temperature and strain sensors for error correction

Chiang, Chia-Fang, Graham, Andrew B., Lee, Brian J., Ahn, Chae Hyuck, Ng, Eldwin J., O'Brien, Gary J., Kenny, Thomas W.

Рік:

2013

Мова:

english

Файл:

PDF, 980 KB

english, 2013

Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators

Ghaffari, Shirin, Chandorkar, Saurabh A., Wang, Shasha, Ng, Eldwin J., Ahn, Chae H., Hong, Vu, Yang, Yushi, Kenny, Thomas W.

Журнал:

Scientific Reports

Рік:

2013

Мова:

english

Файл:

PDF, 566 KB

english, 2013

Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators

Ghaffari, Shirin, Ahn, Chae H., Ng, Eldwin J., Wang, Shasha, Kenny, Thomas W.

Журнал:

Microelectronics Journal

Рік:

2013

Мова:

english

Файл:

PDF, 2.08 MB

english, 2013

[IEEE 2011 IEEE Sensors - Limerick, Ireland (2011.10.28-2011.10.31)] 2011 IEEE SENSORS Proceedings - Stability measurements of silicon MEMS resonant thermometers

Ng, Eldwin J., Lee, Hyung Kyu, Ahn, Chae Hyuck, Melamud, Renata, Kenny, Thomas W.

Рік:

2011

Мова:

english

Файл:

PDF, 877 KB

english, 2011

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Characterization of stiction forces in ultra-clean encapsulated MEMS devices

Heinz, David B., Hong, Vu A., Ng, Eldwin J., Ahn, Chae Hyuck, Yang, Yushi, Kenny, Thomas W.

Рік:

2014

Мова:

english

Файл:

PDF, 1.82 MB

english, 2014

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Stable pull-in electrodes for narrow gap actuation

Ng, Eldwin J., Yang, Yushi, Hong, Vu A., Ahn, Chae Hyuck, Christensen, David L., Gibson, Brian A., Qalandar, Kamala R., Turner, Kimberly L., Kenny, Thomas W.

Рік:

2014

Мова:

english

Файл:

PDF, 1.45 MB

english, 2014

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A 7ppm, 6°/hr frequency-output MEMS gyroscope

Izyumin, Igor I., Kline, Mitchell H., Yeh, Yu-Ching, Eminoglu, Burak, Ahn, Chae Hyuck, Hong, Vu A., Yang, Yushi, Ng, Eldwin J., Kenny, Thomas W., Boser, Bernhard E.

Рік:

2015

Мова:

english

Файл:

PDF, 1.24 MB

english, 2015

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - In-situ ovenization of Lamé-mode silicon resonators for temperature compensation

Chen, Yunhan, Ng, Eldwin J., Yang, Yushi, Ahn, Chae Hyuck, Flader, Ian, Kenny, Thomas W.

Рік:

2015

Мова:

english

Файл:

PDF, 958 KB

english, 2015

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Single-structure 3-axis lorentz force magnetometer with sub-30 nT/√HZ resolution

Li, Mo, Ng, Eldwin J., Hong, Vu A., Ahn, Chae H., Yang, Yushi, Kenny, Thomas W., Horsley, David A.

Рік:

2014

Мова:

english

Файл:

PDF, 1.18 MB

english, 2014

[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Experimental investigation on mode coupling of bulk mode silicon MEMS resonators

Yang, Yushi, Ng, Eldwin, Polunin, Pavel, Chen, Yunhan, Strachan, Scott, Hong, Vu, Ahn, Chae Hyuck, Shoshani, Ori, Shaw, Steven, Dykman, Mark, Kenny, Thomas

Рік:

2015

Мова:

english

Файл:

PDF, 1.66 MB

english, 2015

[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Stable charge-biased capacitive resonators with encapsulated switches

Ng, Eldwin J., Harrison, Kimberly L., Everhart, Camille L., Hong, Vu A., Yang, Yushi, Ahn, Chae Hyuck, Heinz, David B., Howe, Roger T., Kenny, Thomas W.

Рік:

2014

Мова:

english

Файл:

PDF, 2.72 MB

english, 2014

[IEEE 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) - Hapuna Beach, HI, USA (2015.3.23-2015.3.26)] 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings - Disk resonator gyroscope with whole-angle mode operation

Taheri-Tehrani, Parsa, Izyumin, Oleg, Izyumin, Igor, Ahn, Chae H., Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Kenny, Thomas W., Boser, Bernhard E., Horsley, David A.

Рік:

2015

Мова:

english

Файл:

PDF, 962 KB

english, 2015

A bi-stable nanoelectromechanical non-volatile memory based on van der Waals force

Soon, Bo Woon, Jiaqiang Ng, Eldwin, Qian, You, Singh, Navab, Julius Tsai, Minglin, Lee, Chengkuo

Журнал:

Applied Physics Letters

Рік:

2013

Мова:

english

Файл:

PDF, 1.29 MB

english, 2013

[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Modeling the effect of anchor geometry on the quality factor of bulk mode resonators

Gerrard, Dustin D., Ng, Eldwin J., Ahn, Chae H., Hong, Vu A., Yang, Yushi, Kenny, Thomas W.

Рік:

2015

Мова:

english

Файл:

PDF, 1.34 MB

english, 2015

Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within a Wafer-Scale Encapsulation Process

Ahn, Chae Hyuck, Ng, Eldwin J., Hong, Vu A., Huynh, Julia, Wang, Shasha, Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 4.25 MB

english, 2015

Stable Encapsulated Charge-Biased Resonators

Ng, Eldwin J., Harrison, Kimberly L., Yang, Yushi, Ahn, Chae Hyuck, Hong, Vu A., Howe, Roger T., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2015

Мова:

english

Файл:

PDF, 3.36 MB

english, 2015

A Unified Epi-Seal Process for Fabrication of High-Stability Microelectromechanical Devices

Yang, Yushi, Ng, Eldwin J., Chen, Yunhan, Flader, Ian B., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2016

Мова:

english

Файл:

PDF, 2.57 MB

english, 2016

[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Overcoming stiction forces with resonant over-travel stops

Hong, Vu A., Heinz, David B., Christensen, David L., Shin, Dongsuk D., Chen, Yunhan, Ahn, Chae Hyuck, Yang, Yushi, Ng, Eldwin J., Flader, Ian B., Kenny, Thomas W.

Рік:

2016

Мова:

english

Файл:

PDF, 656 KB

english, 2016

[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Ovenized dual-mode clock (ODMC) based on highly doped single crystal silicon resonators

Chen, Yunhan, Ng, Eldwin J., Shin, Dongsuk D., Ahn, Chae H., Yang, Yushi, Flader, Ian B., Hong, Vu A., Kenny, Thomas W.

Рік:

2016

Мова:

english

Файл:

PDF, 1.25 MB

english, 2016

[IEEE 2015 IEEE Sensors - Busan (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - Tunable quality factor through 1:1 modal coupling in a disk resonator

Flader, Ian B., Ahn, Chae H., Yushi Yang,, Ng, Eldwin J., Hong, Vu A., Jeesu Baek,, Kenny, Thomas W.

Рік:

2015

Мова:

english

Файл:

PDF, 1.07 MB

english, 2015

Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices

Heinz, David B., Hong, Vu A., Ahn, Chae Hyuck, Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2016

Мова:

english

Файл:

PDF, 5.34 MB

english, 2016

[IEEE 2016 IEEE International Solid-State Circuits Conference (ISSCC) - San Francisco, CA, USA (2016.1.31-2016.2.4)] 2016 IEEE International Solid-State Circuits Conference (ISSCC) - 11.2 3D ultrasonic fingerprint sensor-on-a-chip

Tang, Hao-Yen, Lu, Yipeng, Assaderagh, Fari, Daneman, Mike, Jiang, Xiaoyue, Lim, Martin, Li, Xi, Ng, Eldwin, Singhal, Utkarsh, Tsai, Julius M., Horsley, David A., Boser, Bernhard E.

Рік:

2016

Мова:

english

Файл:

PDF, 3.34 MB

english, 2016

[IEEE 2016 American Control Conference (ACC) - Boston, MA, USA (2016.7.6-2016.7.8)] 2016 American Control Conference (ACC) - Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance

Flader, Ian B., Ahn, Chae H., Gerrard, Dustin D., Ng, Eldwin J., Yang, Yushi, Hong, Vu A., Pavone, Marco, Kenny, Thomas W.

Рік:

2016

Мова:

english

Файл:

PDF, 951 KB

english, 2016

CORRIGENDUM: Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators

Ghaffari, Shirin, Chandorkar, Saurabh A., Wang, Shasha, Ng, Eldwin J., Ahn, Chae H., Hong, Vu, Yang, Yushi, Kenny, Thomas W.

Журнал:

Scientific Reports

Рік:

2014

Файл:

PDF, 138 KB

2014

[IEEE 2016 IEEE International Ultrasonics Symposium (IUS) - Tours, France (2016.9.18-2016.9.21)] 2016 IEEE International Ultrasonics Symposium (IUS) - Ultrasonic fingerprint sensor based on a PMUT array bonded to CMOS circuitry

Horsley, David A., Lu, Yipeng, Tang, Hao-Yen, Jiang, Xiaoyue, Boser, Bernard E., Tsai, Julius M., Ng, Eldwin J., Daneman, Michael J.

Рік:

2016

Мова:

english

Файл:

PDF, 3.57 MB

english, 2016

[IEEE 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Kauai, HI, USA (2017.3.27-2017.3.30)] 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Compact roll-pitch-yaw gyroscope implemented in wafer-level Epitaxial Silicon Encapsulation process

Efimovskaya, Alexandra, Yushi Yang,, Ng, Eldwin, Yunhan Chen,, Flader, Ian, Kenny, Thomas W., Shkel, Andrei M.

Рік:

2017

Мова:

english

Файл:

PDF, 1.81 MB

english, 2017

[IEEE 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Kauai, HI, USA (2017.3.27-2017.3.30)] 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Electrostatic tuning of temperature coefficient of frequency of anisotropic disk-shaped resonators

Shin, Dongsuk D., Ahn, Chae Hyuck, Chen, Yunhan, Hong, Vu A., Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.

Рік:

2017

Мова:

english

Файл:

PDF, 1.43 MB

english, 2017

Discovery of dual GyrB/ParE inhibitors active against Gram-negative bacteria

Yei, Ho Soo, Weiling, Wang, Mee, Ng Fui, Xuan, Wong Yun, Ying, Poh Zhi, Wai Eldwin, Tan Sum, Hua, Ang Shi, Si, Liew Si, Yin Sze, Joyner Wong, Tan, Yvonne, Poulsen, Anders, Pendharkar, Vishal, Sangthon

Журнал:

European Journal of Medicinal Chemistry

Рік:

2018

Мова:

english

Файл:

PDF, 1.98 MB

english, 2018

Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator

Rodriguez, Janna, Chandorkar, Saurabh A., Watson, Christopher A., Glaze, Grant M., Ahn, C. H., Ng, Eldwin J., Yang, Yushi, Kenny, Thomas W.

Журнал:

Scientific Reports

Рік:

2019

Файл:

PDF, 2.96 MB

2019

Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity

Flader, Ian B., Chen, Yunhan, Yang, Yushi, Ng, Eldwin J., Shin, Dongsuk D., Heinz, David B., Ortiz, Lizmarie Comenencia, Alter, Anne L., Park, Woosung, Goodson, Kenneth E., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2019

Файл:

PDF, 3.20 MB

2019

Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity

Flader, Ian B., Chen, Yunhan, Yang, Yushi, Ng, Eldwin J., Shin, Dongsuk D., Heinz, David B., Ortiz, Lizmarie Comenencia, Alter, Anne L., Park, Woosung, Goodson, Kenneth E., Kenny, Thomas W.

Журнал:

Journal of Microelectromechanical Systems

Рік:

2019

Мова:

english

Файл:

PDF, 3.20 MB

english, 2019

[IEEE 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) - Singapore, Singapore (2018.12.4-2018.12.7)] 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) - A Lame Mode Resonator Based on Aluminum Nitride on Silicon Platform

Wang, Nan, Zhu, Yao, Wu, Guoqiang, Ding, Zhipeng, Ng, Eldwin Jiaqiang, Yoshio, Nishida, Chang, Peter Hyun Kee, Singh, Navab, Gu, Yuandong

Рік:

2018

Файл:

PDF, 530 KB

2018

MEMS Resonators for Frequency Reference and Timing Applications

Wu, Guoqiang, Xu, Jinghui, Ng, Eldwin Jiaqiang, Chen, Wen

Журнал:

Journal of Microelectromechanical Systems

Рік:

2020

Файл:

PDF, 9.10 MB

2020